8/19/2012	9:45:19 AM	Recipe started at 9:45 AM
8/19/2012	9:45:19 AM	Helium valve closed
8/19/2012	9:45:19 AM	H2 valve closed
8/19/2012	9:45:19 AM	BCl3 valve closed
8/19/2012	9:45:19 AM	PH3 valve closed
8/19/2012	9:45:19 AM	SiCl4 pre valve closed
8/19/2012	9:45:19 AM	SiCl4 post valve closed
8/19/2012	9:45:19 AM	Main Vac valve closed
8/19/2012	9:45:19 AM	Bypass valve closed
8/19/2012	9:45:19 AM	Bubbler valve closed
8/19/2012	9:45:19 AM	Helium MFC set to  0.000000
8/19/2012	9:45:19 AM	H2 MFC set to  0.000000
8/19/2012	9:45:19 AM	BCl3 MFC set to  0.000000
8/19/2012	9:45:19 AM	PH3 MFC set to  0.000000
8/19/2012	9:45:19 AM	SiCl4 MFC set to  0.000000
8/19/2012	9:45:19 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:45:19 AM	Tube furnace set to 0
8/19/2012	9:45:22 AM	Helium valve closed
8/19/2012	9:45:22 AM	BCl3 valve closed
8/19/2012	9:45:22 AM	PH3 valve closed
8/19/2012	9:45:22 AM	SiCl4 pre valve closed
8/19/2012	9:45:22 AM	SiCl4 post valve closed
8/19/2012	9:45:22 AM	Main Vac valve closed
8/19/2012	9:45:22 AM	Bypass valve closed
8/19/2012	9:45:22 AM	Bubbler valve closed
8/19/2012	9:45:22 AM	H2 valve opened
8/19/2012	9:45:22 AM	Helium MFC set to  0.000000
8/19/2012	9:45:22 AM	H2 MFC set to  500.000000
8/19/2012	9:45:22 AM	BCl3 MFC set to  0.000000
8/19/2012	9:45:22 AM	PH3 MFC set to  0.000000
8/19/2012	9:45:22 AM	SiCl4 MFC set to  0.000000
8/19/2012	9:45:22 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:45:23 AM	Tube furnace set to 50
8/19/2012	9:46:38 AM	Helium valve closed
8/19/2012	9:46:38 AM	BCl3 valve closed
8/19/2012	9:46:38 AM	PH3 valve closed
8/19/2012	9:46:38 AM	SiCl4 pre valve closed
8/19/2012	9:46:38 AM	SiCl4 post valve closed
8/19/2012	9:46:38 AM	Main Vac valve closed
8/19/2012	9:46:38 AM	Bypass valve closed
8/19/2012	9:46:38 AM	H2 valve opened
8/19/2012	9:46:38 AM	Bubbler valve opened
8/19/2012	9:46:38 AM	Helium MFC set to  0.000000
8/19/2012	9:46:38 AM	H2 MFC set to  500.000000
8/19/2012	9:46:38 AM	BCl3 MFC set to  0.000000
8/19/2012	9:46:38 AM	PH3 MFC set to  0.000000
8/19/2012	9:46:38 AM	SiCl4 MFC set to  0.000000
8/19/2012	9:46:38 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:46:39 AM	Tube furnace set to 50
8/19/2012	9:46:40 AM	Helium valve closed
8/19/2012	9:46:40 AM	BCl3 valve closed
8/19/2012	9:46:40 AM	PH3 valve closed
8/19/2012	9:46:40 AM	SiCl4 pre valve closed
8/19/2012	9:46:40 AM	SiCl4 post valve closed
8/19/2012	9:46:40 AM	Main Vac valve closed
8/19/2012	9:46:40 AM	Bypass valve closed
8/19/2012	9:46:40 AM	H2 valve opened
8/19/2012	9:46:40 AM	Bubbler valve opened
8/19/2012	9:46:40 AM	Helium MFC set to  0.000000
8/19/2012	9:46:40 AM	H2 MFC set to  500.000000
8/19/2012	9:46:40 AM	BCl3 MFC set to  0.000000
8/19/2012	9:46:40 AM	PH3 MFC set to  0.000000
8/19/2012	9:46:40 AM	SiCl4 MFC set to  0.000000
8/19/2012	9:46:40 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:46:40 AM	Tube furnace set to 1000
8/19/2012	10:06:40 AM	Helium valve closed
8/19/2012	10:06:40 AM	PH3 valve closed
8/19/2012	10:06:40 AM	Main Vac valve closed
8/19/2012	10:06:40 AM	Bypass valve closed
8/19/2012	10:06:40 AM	H2 valve opened
8/19/2012	10:06:40 AM	BCl3 valve opened
8/19/2012	10:06:40 AM	SiCl4 pre valve opened
8/19/2012	10:06:40 AM	SiCl4 post valve opened
8/19/2012	10:06:40 AM	Bubbler valve opened
8/19/2012	10:06:40 AM	Helium MFC set to  0.000000
8/19/2012	10:06:40 AM	H2 MFC set to  500.000000
8/19/2012	10:06:40 AM	BCl3 MFC set to  1.000000
8/19/2012	10:06:40 AM	PH3 MFC set to  0.000000
8/19/2012	10:06:40 AM	SiCl4 MFC set to  50.000000
8/19/2012	10:06:40 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:06:40 AM	Tube furnace set to 1000
8/19/2012	10:26:40 AM	Helium valve closed
8/19/2012	10:26:40 AM	BCl3 valve closed
8/19/2012	10:26:40 AM	PH3 valve closed
8/19/2012	10:26:40 AM	SiCl4 pre valve closed
8/19/2012	10:26:40 AM	SiCl4 post valve closed
8/19/2012	10:26:40 AM	Main Vac valve closed
8/19/2012	10:26:40 AM	Bypass valve closed
8/19/2012	10:26:40 AM	H2 valve opened
8/19/2012	10:26:40 AM	Bubbler valve opened
8/19/2012	10:26:40 AM	Helium MFC set to  0.000000
8/19/2012	10:26:40 AM	H2 MFC set to  500.000000
8/19/2012	10:26:40 AM	BCl3 MFC set to  0.000000
8/19/2012	10:26:40 AM	PH3 MFC set to  0.000000
8/19/2012	10:26:40 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:26:40 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:26:40 AM	Tube furnace set to 950
8/19/2012	10:29:40 AM	Helium valve closed
8/19/2012	10:29:40 AM	BCl3 valve closed
8/19/2012	10:29:40 AM	PH3 valve closed
8/19/2012	10:29:40 AM	SiCl4 pre valve closed
8/19/2012	10:29:40 AM	SiCl4 post valve closed
8/19/2012	10:29:40 AM	Main Vac valve closed
8/19/2012	10:29:40 AM	Bypass valve closed
8/19/2012	10:29:40 AM	H2 valve opened
8/19/2012	10:29:40 AM	Bubbler valve opened
8/19/2012	10:29:40 AM	Helium MFC set to  0.000000
8/19/2012	10:29:40 AM	H2 MFC set to  500.000000
8/19/2012	10:29:40 AM	BCl3 MFC set to  0.000000
8/19/2012	10:29:40 AM	PH3 MFC set to  0.000000
8/19/2012	10:29:40 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:29:40 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:29:40 AM	Tube furnace set to 900
8/19/2012	10:32:40 AM	Helium valve closed
8/19/2012	10:32:40 AM	BCl3 valve closed
8/19/2012	10:32:40 AM	PH3 valve closed
8/19/2012	10:32:40 AM	SiCl4 pre valve closed
8/19/2012	10:32:40 AM	SiCl4 post valve closed
8/19/2012	10:32:40 AM	Main Vac valve closed
8/19/2012	10:32:40 AM	Bypass valve closed
8/19/2012	10:32:40 AM	H2 valve opened
8/19/2012	10:32:40 AM	Bubbler valve opened
8/19/2012	10:32:40 AM	Helium MFC set to  0.000000
8/19/2012	10:32:40 AM	H2 MFC set to  500.000000
8/19/2012	10:32:40 AM	BCl3 MFC set to  0.000000
8/19/2012	10:32:40 AM	PH3 MFC set to  0.000000
8/19/2012	10:32:40 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:32:40 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:32:41 AM	Tube furnace set to 850
8/19/2012	10:35:41 AM	Helium valve closed
8/19/2012	10:35:41 AM	BCl3 valve closed
8/19/2012	10:35:41 AM	PH3 valve closed
8/19/2012	10:35:41 AM	SiCl4 pre valve closed
8/19/2012	10:35:41 AM	SiCl4 post valve closed
8/19/2012	10:35:41 AM	Main Vac valve closed
8/19/2012	10:35:41 AM	Bypass valve closed
8/19/2012	10:35:41 AM	H2 valve opened
8/19/2012	10:35:41 AM	Bubbler valve opened
8/19/2012	10:35:41 AM	Helium MFC set to  0.000000
8/19/2012	10:35:41 AM	H2 MFC set to  500.000000
8/19/2012	10:35:41 AM	BCl3 MFC set to  0.000000
8/19/2012	10:35:41 AM	PH3 MFC set to  0.000000
8/19/2012	10:35:41 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:35:41 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:35:41 AM	Tube furnace set to 800
8/19/2012	10:38:41 AM	Helium valve closed
8/19/2012	10:38:41 AM	BCl3 valve closed
8/19/2012	10:38:41 AM	PH3 valve closed
8/19/2012	10:38:41 AM	SiCl4 pre valve closed
8/19/2012	10:38:41 AM	SiCl4 post valve closed
8/19/2012	10:38:41 AM	Main Vac valve closed
8/19/2012	10:38:41 AM	Bypass valve closed
8/19/2012	10:38:41 AM	H2 valve opened
8/19/2012	10:38:41 AM	Bubbler valve opened
8/19/2012	10:38:41 AM	Helium MFC set to  0.000000
8/19/2012	10:38:41 AM	H2 MFC set to  500.000000
8/19/2012	10:38:41 AM	BCl3 MFC set to  0.000000
8/19/2012	10:38:41 AM	PH3 MFC set to  0.000000
8/19/2012	10:38:41 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:38:41 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:38:41 AM	Tube furnace set to 750
8/19/2012	10:41:41 AM	H2 valve closed
8/19/2012	10:41:41 AM	BCl3 valve closed
8/19/2012	10:41:41 AM	PH3 valve closed
8/19/2012	10:41:41 AM	SiCl4 pre valve closed
8/19/2012	10:41:41 AM	SiCl4 post valve closed
8/19/2012	10:41:41 AM	Main Vac valve closed
8/19/2012	10:41:41 AM	Bypass valve closed
8/19/2012	10:41:41 AM	Helium valve opened
8/19/2012	10:41:41 AM	Bubbler valve opened
8/19/2012	10:41:41 AM	Helium MFC set to  400.000000
8/19/2012	10:41:41 AM	H2 MFC set to  0.000000
8/19/2012	10:41:41 AM	BCl3 MFC set to  0.000000
8/19/2012	10:41:41 AM	PH3 MFC set to  0.000000
8/19/2012	10:41:41 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:41:41 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:41:41 AM	Tube furnace set to 0
8/19/2012	10:58:16 AM	Helium valve closed
8/19/2012	10:58:16 AM	H2 valve closed
8/19/2012	10:58:16 AM	BCl3 valve closed
8/19/2012	10:58:16 AM	PH3 valve closed
8/19/2012	10:58:16 AM	SiCl4 pre valve closed
8/19/2012	10:58:16 AM	SiCl4 post valve closed
8/19/2012	10:58:16 AM	Main Vac valve closed
8/19/2012	10:58:16 AM	Bypass valve closed
8/19/2012	10:58:16 AM	Bubbler valve closed
8/19/2012	10:58:16 AM	Helium MFC set to  0.000000
8/19/2012	10:58:16 AM	H2 MFC set to  0.000000
8/19/2012	10:58:16 AM	BCl3 MFC set to  0.000000
8/19/2012	10:58:16 AM	PH3 MFC set to  0.000000
8/19/2012	10:58:16 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:58:16 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:58:16 AM	Tube furnace set to 50
8/19/2012	10:58:17 AM	Helium valve closed
8/19/2012	10:58:17 AM	H2 valve closed
8/19/2012	10:58:17 AM	BCl3 valve closed
8/19/2012	10:58:17 AM	PH3 valve closed
8/19/2012	10:58:17 AM	SiCl4 pre valve closed
8/19/2012	10:58:17 AM	SiCl4 post valve closed
8/19/2012	10:58:17 AM	Main Vac valve closed
8/19/2012	10:58:17 AM	Bubbler valve closed
8/19/2012	10:58:17 AM	Bypass valve opened
8/19/2012	10:58:17 AM	Helium MFC set to  0.000000
8/19/2012	10:58:17 AM	H2 MFC set to  0.000000
8/19/2012	10:58:17 AM	BCl3 MFC set to  0.000000
8/19/2012	10:58:17 AM	PH3 MFC set to  0.000000
8/19/2012	10:58:17 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:58:17 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:58:17 AM	Tube furnace set to 0
8/19/2012	10:59:14 AM	Helium valve closed
8/19/2012	10:59:14 AM	H2 valve closed
8/19/2012	10:59:14 AM	BCl3 valve closed
8/19/2012	10:59:14 AM	PH3 valve closed
8/19/2012	10:59:14 AM	SiCl4 pre valve closed
8/19/2012	10:59:14 AM	SiCl4 post valve closed
8/19/2012	10:59:14 AM	Bypass valve closed
8/19/2012	10:59:14 AM	Bubbler valve closed
8/19/2012	10:59:14 AM	Main Vac valve opened
8/19/2012	10:59:14 AM	Helium MFC set to  0.000000
8/19/2012	10:59:14 AM	H2 MFC set to  0.000000
8/19/2012	10:59:14 AM	BCl3 MFC set to  0.000000
8/19/2012	10:59:14 AM	PH3 MFC set to  0.000000
8/19/2012	10:59:14 AM	SiCl4 MFC set to  0.000000
8/19/2012	10:59:14 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	10:59:14 AM	Tube furnace set to 0
8/19/2012	10:59:15 AM	Run finished at 10:59 AM
8/19/2012	11:02:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	11:02:54 AM	Recipe started at 11:02 AM
8/19/2012	11:02:54 AM	Helium valve closed
8/19/2012	11:02:54 AM	H2 valve closed
8/19/2012	11:02:54 AM	BCl3 valve closed
8/19/2012	11:02:54 AM	PH3 valve closed
8/19/2012	11:02:54 AM	SiCl4 pre valve closed
8/19/2012	11:02:54 AM	SiCl4 post valve closed
8/19/2012	11:02:54 AM	Main Vac valve closed
8/19/2012	11:02:54 AM	Bypass valve closed
8/19/2012	11:02:54 AM	Bubbler valve closed
8/19/2012	11:02:54 AM	Helium MFC set to  0.000000
8/19/2012	11:02:54 AM	H2 MFC set to  0.000000
8/19/2012	11:02:54 AM	BCl3 MFC set to  0.000000
8/19/2012	11:02:54 AM	PH3 MFC set to  0.000000
8/19/2012	11:02:54 AM	SiCl4 MFC set to  0.000000
8/19/2012	11:02:54 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	11:02:54 AM	Tube furnace set to 0
8/19/2012	11:02:57 AM	H2 valve closed
8/19/2012	11:02:57 AM	BCl3 valve closed
8/19/2012	11:02:57 AM	PH3 valve closed
8/19/2012	11:02:57 AM	SiCl4 pre valve closed
8/19/2012	11:02:57 AM	SiCl4 post valve closed
8/19/2012	11:02:57 AM	Main Vac valve closed
8/19/2012	11:02:57 AM	Bypass valve closed
8/19/2012	11:02:57 AM	Bubbler valve closed
8/19/2012	11:02:57 AM	Helium valve opened
8/19/2012	11:02:57 AM	Helium MFC set to  500.000000
8/19/2012	11:02:57 AM	H2 MFC set to  0.000000
8/19/2012	11:02:57 AM	BCl3 MFC set to  0.000000
8/19/2012	11:02:57 AM	PH3 MFC set to  0.000000
8/19/2012	11:02:57 AM	SiCl4 MFC set to  0.000000
8/19/2012	11:02:57 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	11:02:57 AM	Tube furnace set to 0
8/19/2012	11:04:04 AM	Helium valve closed
8/19/2012	11:04:04 AM	H2 valve closed
8/19/2012	11:04:04 AM	BCl3 valve closed
8/19/2012	11:04:04 AM	PH3 valve closed
8/19/2012	11:04:04 AM	SiCl4 pre valve closed
8/19/2012	11:04:04 AM	SiCl4 post valve closed
8/19/2012	11:04:04 AM	Main Vac valve closed
8/19/2012	11:04:04 AM	Bypass valve closed
8/19/2012	11:04:04 AM	Bubbler valve closed
8/19/2012	11:04:04 AM	Helium MFC set to  0.000000
8/19/2012	11:04:04 AM	H2 MFC set to  0.000000
8/19/2012	11:04:04 AM	BCl3 MFC set to  0.000000
8/19/2012	11:04:04 AM	PH3 MFC set to  0.000000
8/19/2012	11:04:04 AM	SiCl4 MFC set to  0.000000
8/19/2012	11:04:04 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	11:04:05 AM	Tube furnace set to 0
8/19/2012	11:04:06 AM	Run finished at 11:04 AM
8/19/2012	11:04:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	11:12:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	11:12:01 AM	Recipe started at 11:12 AM
8/19/2012	11:12:01 AM	Helium valve closed
8/19/2012	11:12:01 AM	H2 valve closed
8/19/2012	11:12:01 AM	BCl3 valve closed
8/19/2012	11:12:01 AM	PH3 valve closed
8/19/2012	11:12:01 AM	SiCl4 pre valve closed
8/19/2012	11:12:01 AM	SiCl4 post valve closed
8/19/2012	11:12:01 AM	Main Vac valve closed
8/19/2012	11:12:01 AM	Bubbler valve closed
8/19/2012	11:12:01 AM	Bypass valve opened
8/19/2012	11:12:01 AM	Helium MFC set to  0.000000
8/19/2012	11:12:01 AM	H2 MFC set to  0.000000
8/19/2012	11:12:01 AM	BCl3 MFC set to  0.000000
8/19/2012	11:12:01 AM	PH3 MFC set to  0.000000
8/19/2012	11:12:01 AM	SiCl4 MFC set to  0.000000
8/19/2012	11:12:01 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	11:12:01 AM	Tube furnace set to 0
8/19/2012	11:13:29 AM	Helium valve closed
8/19/2012	11:13:29 AM	H2 valve closed
8/19/2012	11:13:29 AM	BCl3 valve closed
8/19/2012	11:13:29 AM	PH3 valve closed
8/19/2012	11:13:29 AM	SiCl4 pre valve closed
8/19/2012	11:13:29 AM	SiCl4 post valve closed
8/19/2012	11:13:29 AM	Main Vac valve closed
8/19/2012	11:13:29 AM	Bubbler valve closed
8/19/2012	11:13:29 AM	Bypass valve opened
8/19/2012	11:13:29 AM	Helium MFC set to  0.000000
8/19/2012	11:13:29 AM	H2 MFC set to  0.000000
8/19/2012	11:13:29 AM	BCl3 MFC set to  0.000000
8/19/2012	11:13:29 AM	PH3 MFC set to  0.000000
8/19/2012	11:13:29 AM	SiCl4 MFC set to  0.000000
8/19/2012	11:13:29 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	11:13:29 AM	Tube furnace set to 0
8/19/2012	11:14:29 AM	Helium valve closed
8/19/2012	11:14:29 AM	H2 valve closed
8/19/2012	11:14:29 AM	BCl3 valve closed
8/19/2012	11:14:29 AM	PH3 valve closed
8/19/2012	11:14:29 AM	SiCl4 pre valve closed
8/19/2012	11:14:29 AM	SiCl4 post valve closed
8/19/2012	11:14:29 AM	Bypass valve closed
8/19/2012	11:14:29 AM	Bubbler valve closed
8/19/2012	11:14:29 AM	Main Vac valve opened
8/19/2012	11:14:29 AM	Helium MFC set to  0.000000
8/19/2012	11:14:29 AM	H2 MFC set to  0.000000
8/19/2012	11:14:29 AM	BCl3 MFC set to  0.000000
8/19/2012	11:14:29 AM	PH3 MFC set to  0.000000
8/19/2012	11:14:29 AM	SiCl4 MFC set to  0.000000
8/19/2012	11:14:29 AM	Bypass solenoid MFC set to  0.000000
8/19/2012	11:14:29 AM	Tube furnace set to 0
8/19/2012	11:14:30 AM	Run finished at 11:14 AM
8/19/2012	11:14:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	12:14:58 PM	Recipe started at 12:14 PM
8/19/2012	12:14:58 PM	Helium valve closed
8/19/2012	12:14:58 PM	H2 valve closed
8/19/2012	12:14:58 PM	BCl3 valve closed
8/19/2012	12:14:58 PM	PH3 valve closed
8/19/2012	12:14:58 PM	SiCl4 pre valve closed
8/19/2012	12:14:58 PM	SiCl4 post valve closed
8/19/2012	12:14:58 PM	Main Vac valve closed
8/19/2012	12:14:58 PM	Bypass valve closed
8/19/2012	12:14:58 PM	Bubbler valve closed
8/19/2012	12:14:58 PM	Helium MFC set to  0.000000
8/19/2012	12:14:58 PM	H2 MFC set to  0.000000
8/19/2012	12:14:58 PM	BCl3 MFC set to  0.000000
8/19/2012	12:14:58 PM	PH3 MFC set to  0.000000
8/19/2012	12:14:58 PM	SiCl4 MFC set to  0.000000
8/19/2012	12:14:58 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:14:58 PM	Tube furnace set to 0
8/19/2012	12:15:01 PM	Helium valve closed
8/19/2012	12:15:01 PM	BCl3 valve closed
8/19/2012	12:15:01 PM	PH3 valve closed
8/19/2012	12:15:01 PM	SiCl4 pre valve closed
8/19/2012	12:15:01 PM	SiCl4 post valve closed
8/19/2012	12:15:01 PM	Main Vac valve closed
8/19/2012	12:15:01 PM	Bypass valve closed
8/19/2012	12:15:01 PM	Bubbler valve closed
8/19/2012	12:15:01 PM	H2 valve opened
8/19/2012	12:15:01 PM	Helium MFC set to  0.000000
8/19/2012	12:15:01 PM	H2 MFC set to  500.000000
8/19/2012	12:15:01 PM	BCl3 MFC set to  0.000000
8/19/2012	12:15:01 PM	PH3 MFC set to  0.000000
8/19/2012	12:15:01 PM	SiCl4 MFC set to  0.000000
8/19/2012	12:15:01 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:15:01 PM	Tube furnace set to 50
8/19/2012	12:16:13 PM	Helium valve closed
8/19/2012	12:16:13 PM	BCl3 valve closed
8/19/2012	12:16:13 PM	PH3 valve closed
8/19/2012	12:16:13 PM	SiCl4 pre valve closed
8/19/2012	12:16:13 PM	SiCl4 post valve closed
8/19/2012	12:16:13 PM	Main Vac valve closed
8/19/2012	12:16:13 PM	Bypass valve closed
8/19/2012	12:16:13 PM	H2 valve opened
8/19/2012	12:16:13 PM	Bubbler valve opened
8/19/2012	12:16:13 PM	Helium MFC set to  0.000000
8/19/2012	12:16:13 PM	H2 MFC set to  500.000000
8/19/2012	12:16:13 PM	BCl3 MFC set to  0.000000
8/19/2012	12:16:13 PM	PH3 MFC set to  0.000000
8/19/2012	12:16:13 PM	SiCl4 MFC set to  0.000000
8/19/2012	12:16:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:16:13 PM	Tube furnace set to 50
8/19/2012	12:16:14 PM	Helium valve closed
8/19/2012	12:16:14 PM	BCl3 valve closed
8/19/2012	12:16:14 PM	PH3 valve closed
8/19/2012	12:16:14 PM	SiCl4 pre valve closed
8/19/2012	12:16:14 PM	SiCl4 post valve closed
8/19/2012	12:16:14 PM	Main Vac valve closed
8/19/2012	12:16:14 PM	Bypass valve closed
8/19/2012	12:16:14 PM	H2 valve opened
8/19/2012	12:16:14 PM	Bubbler valve opened
8/19/2012	12:16:14 PM	Helium MFC set to  0.000000
8/19/2012	12:16:14 PM	H2 MFC set to  500.000000
8/19/2012	12:16:14 PM	BCl3 MFC set to  0.000000
8/19/2012	12:16:14 PM	PH3 MFC set to  0.000000
8/19/2012	12:16:14 PM	SiCl4 MFC set to  0.000000
8/19/2012	12:16:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:16:14 PM	Tube furnace set to 1000
8/19/2012	12:36:14 PM	Helium valve closed
8/19/2012	12:36:14 PM	PH3 valve closed
8/19/2012	12:36:14 PM	Main Vac valve closed
8/19/2012	12:36:14 PM	Bypass valve closed
8/19/2012	12:36:14 PM	H2 valve opened
8/19/2012	12:36:14 PM	BCl3 valve opened
8/19/2012	12:36:14 PM	SiCl4 pre valve opened
8/19/2012	12:36:14 PM	SiCl4 post valve opened
8/19/2012	12:36:14 PM	Bubbler valve opened
8/19/2012	12:36:14 PM	Helium MFC set to  0.000000
8/19/2012	12:36:14 PM	H2 MFC set to  500.000000
8/19/2012	12:36:14 PM	BCl3 MFC set to  1.000000
8/19/2012	12:36:14 PM	PH3 MFC set to  0.000000
8/19/2012	12:36:14 PM	SiCl4 MFC set to  50.000000
8/19/2012	12:36:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:36:14 PM	Tube furnace set to 1000
8/19/2012	12:56:14 PM	Helium valve closed
8/19/2012	12:56:14 PM	BCl3 valve closed
8/19/2012	12:56:14 PM	PH3 valve closed
8/19/2012	12:56:14 PM	SiCl4 pre valve closed
8/19/2012	12:56:14 PM	SiCl4 post valve closed
8/19/2012	12:56:14 PM	Main Vac valve closed
8/19/2012	12:56:14 PM	Bypass valve closed
8/19/2012	12:56:14 PM	H2 valve opened
8/19/2012	12:56:14 PM	Bubbler valve opened
8/19/2012	12:56:14 PM	Helium MFC set to  0.000000
8/19/2012	12:56:14 PM	H2 MFC set to  500.000000
8/19/2012	12:56:14 PM	BCl3 MFC set to  0.000000
8/19/2012	12:56:14 PM	PH3 MFC set to  0.000000
8/19/2012	12:56:14 PM	SiCl4 MFC set to  0.000000
8/19/2012	12:56:14 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:56:14 PM	Tube furnace set to 950
8/19/2012	12:59:14 PM	Helium valve closed
8/19/2012	12:59:14 PM	BCl3 valve closed
8/19/2012	12:59:15 PM	PH3 valve closed
8/19/2012	12:59:15 PM	SiCl4 pre valve closed
8/19/2012	12:59:15 PM	SiCl4 post valve closed
8/19/2012	12:59:15 PM	Main Vac valve closed
8/19/2012	12:59:15 PM	Bypass valve closed
8/19/2012	12:59:15 PM	H2 valve opened
8/19/2012	12:59:15 PM	Bubbler valve opened
8/19/2012	12:59:15 PM	Helium MFC set to  0.000000
8/19/2012	12:59:15 PM	H2 MFC set to  500.000000
8/19/2012	12:59:15 PM	BCl3 MFC set to  0.000000
8/19/2012	12:59:15 PM	PH3 MFC set to  0.000000
8/19/2012	12:59:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	12:59:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	12:59:15 PM	Tube furnace set to 900
8/19/2012	1:02:15 PM	Helium valve closed
8/19/2012	1:02:15 PM	BCl3 valve closed
8/19/2012	1:02:15 PM	PH3 valve closed
8/19/2012	1:02:15 PM	SiCl4 pre valve closed
8/19/2012	1:02:15 PM	SiCl4 post valve closed
8/19/2012	1:02:15 PM	Main Vac valve closed
8/19/2012	1:02:15 PM	Bypass valve closed
8/19/2012	1:02:15 PM	H2 valve opened
8/19/2012	1:02:15 PM	Bubbler valve opened
8/19/2012	1:02:15 PM	Helium MFC set to  0.000000
8/19/2012	1:02:15 PM	H2 MFC set to  500.000000
8/19/2012	1:02:15 PM	BCl3 MFC set to  0.000000
8/19/2012	1:02:15 PM	PH3 MFC set to  0.000000
8/19/2012	1:02:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:02:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:02:15 PM	Tube furnace set to 850
8/19/2012	1:05:15 PM	Helium valve closed
8/19/2012	1:05:15 PM	BCl3 valve closed
8/19/2012	1:05:15 PM	PH3 valve closed
8/19/2012	1:05:15 PM	SiCl4 pre valve closed
8/19/2012	1:05:15 PM	SiCl4 post valve closed
8/19/2012	1:05:15 PM	Main Vac valve closed
8/19/2012	1:05:15 PM	Bypass valve closed
8/19/2012	1:05:15 PM	H2 valve opened
8/19/2012	1:05:15 PM	Bubbler valve opened
8/19/2012	1:05:15 PM	Helium MFC set to  0.000000
8/19/2012	1:05:15 PM	H2 MFC set to  500.000000
8/19/2012	1:05:15 PM	BCl3 MFC set to  0.000000
8/19/2012	1:05:15 PM	PH3 MFC set to  0.000000
8/19/2012	1:05:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:05:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:05:15 PM	Tube furnace set to 800
8/19/2012	1:08:15 PM	Helium valve closed
8/19/2012	1:08:15 PM	BCl3 valve closed
8/19/2012	1:08:15 PM	PH3 valve closed
8/19/2012	1:08:15 PM	SiCl4 pre valve closed
8/19/2012	1:08:15 PM	SiCl4 post valve closed
8/19/2012	1:08:15 PM	Main Vac valve closed
8/19/2012	1:08:15 PM	Bypass valve closed
8/19/2012	1:08:15 PM	H2 valve opened
8/19/2012	1:08:15 PM	Bubbler valve opened
8/19/2012	1:08:15 PM	Helium MFC set to  0.000000
8/19/2012	1:08:15 PM	H2 MFC set to  500.000000
8/19/2012	1:08:15 PM	BCl3 MFC set to  0.000000
8/19/2012	1:08:15 PM	PH3 MFC set to  0.000000
8/19/2012	1:08:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:08:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:08:15 PM	Tube furnace set to 750
8/19/2012	1:11:15 PM	H2 valve closed
8/19/2012	1:11:15 PM	BCl3 valve closed
8/19/2012	1:11:15 PM	PH3 valve closed
8/19/2012	1:11:15 PM	SiCl4 pre valve closed
8/19/2012	1:11:15 PM	SiCl4 post valve closed
8/19/2012	1:11:15 PM	Main Vac valve closed
8/19/2012	1:11:15 PM	Bypass valve closed
8/19/2012	1:11:15 PM	Helium valve opened
8/19/2012	1:11:15 PM	Bubbler valve opened
8/19/2012	1:11:15 PM	Helium MFC set to  400.000000
8/19/2012	1:11:15 PM	H2 MFC set to  0.000000
8/19/2012	1:11:15 PM	BCl3 MFC set to  0.000000
8/19/2012	1:11:15 PM	PH3 MFC set to  0.000000
8/19/2012	1:11:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:11:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:11:16 PM	Tube furnace set to 0
8/19/2012	1:21:11 PM	Helium valve closed
8/19/2012	1:21:11 PM	H2 valve closed
8/19/2012	1:21:11 PM	BCl3 valve closed
8/19/2012	1:21:11 PM	PH3 valve closed
8/19/2012	1:21:11 PM	SiCl4 pre valve closed
8/19/2012	1:21:11 PM	SiCl4 post valve closed
8/19/2012	1:21:11 PM	Main Vac valve closed
8/19/2012	1:21:11 PM	Bypass valve closed
8/19/2012	1:21:11 PM	Bubbler valve closed
8/19/2012	1:21:11 PM	Helium MFC set to  0.000000
8/19/2012	1:21:11 PM	H2 MFC set to  0.000000
8/19/2012	1:21:11 PM	BCl3 MFC set to  0.000000
8/19/2012	1:21:11 PM	PH3 MFC set to  0.000000
8/19/2012	1:21:11 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:21:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:21:11 PM	Tube furnace set to 50
8/19/2012	1:21:13 PM	Helium valve closed
8/19/2012	1:21:13 PM	H2 valve closed
8/19/2012	1:21:13 PM	BCl3 valve closed
8/19/2012	1:21:13 PM	PH3 valve closed
8/19/2012	1:21:13 PM	SiCl4 pre valve closed
8/19/2012	1:21:13 PM	SiCl4 post valve closed
8/19/2012	1:21:13 PM	Main Vac valve closed
8/19/2012	1:21:13 PM	Bubbler valve closed
8/19/2012	1:21:13 PM	Bypass valve opened
8/19/2012	1:21:13 PM	Helium MFC set to  0.000000
8/19/2012	1:21:13 PM	H2 MFC set to  0.000000
8/19/2012	1:21:13 PM	BCl3 MFC set to  0.000000
8/19/2012	1:21:13 PM	PH3 MFC set to  0.000000
8/19/2012	1:21:13 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:21:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:21:13 PM	Tube furnace set to 0
8/19/2012	1:22:15 PM	Helium valve closed
8/19/2012	1:22:15 PM	H2 valve closed
8/19/2012	1:22:15 PM	BCl3 valve closed
8/19/2012	1:22:15 PM	PH3 valve closed
8/19/2012	1:22:15 PM	SiCl4 pre valve closed
8/19/2012	1:22:15 PM	SiCl4 post valve closed
8/19/2012	1:22:15 PM	Bypass valve closed
8/19/2012	1:22:15 PM	Bubbler valve closed
8/19/2012	1:22:15 PM	Main Vac valve opened
8/19/2012	1:22:15 PM	Helium MFC set to  0.000000
8/19/2012	1:22:15 PM	H2 MFC set to  0.000000
8/19/2012	1:22:15 PM	BCl3 MFC set to  0.000000
8/19/2012	1:22:15 PM	PH3 MFC set to  0.000000
8/19/2012	1:22:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:22:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:22:16 PM	Tube furnace set to 0
8/19/2012	1:22:17 PM	Run finished at 1:22 PM
8/19/2012	1:22:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	1:22:20 PM	Recipe started at 1:22 PM
8/19/2012	1:22:20 PM	Helium valve closed
8/19/2012	1:22:20 PM	H2 valve closed
8/19/2012	1:22:20 PM	BCl3 valve closed
8/19/2012	1:22:20 PM	PH3 valve closed
8/19/2012	1:22:20 PM	SiCl4 pre valve closed
8/19/2012	1:22:20 PM	SiCl4 post valve closed
8/19/2012	1:22:20 PM	Main Vac valve closed
8/19/2012	1:22:20 PM	Bypass valve closed
8/19/2012	1:22:20 PM	Bubbler valve closed
8/19/2012	1:22:20 PM	Helium MFC set to  0.000000
8/19/2012	1:22:20 PM	H2 MFC set to  0.000000
8/19/2012	1:22:20 PM	BCl3 MFC set to  0.000000
8/19/2012	1:22:20 PM	PH3 MFC set to  0.000000
8/19/2012	1:22:20 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:22:20 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:22:20 PM	Tube furnace set to 0
8/19/2012	1:22:23 PM	H2 valve closed
8/19/2012	1:22:23 PM	BCl3 valve closed
8/19/2012	1:22:23 PM	PH3 valve closed
8/19/2012	1:22:23 PM	SiCl4 pre valve closed
8/19/2012	1:22:23 PM	SiCl4 post valve closed
8/19/2012	1:22:23 PM	Main Vac valve closed
8/19/2012	1:22:23 PM	Bypass valve closed
8/19/2012	1:22:23 PM	Bubbler valve closed
8/19/2012	1:22:23 PM	Helium valve opened
8/19/2012	1:22:23 PM	Helium MFC set to  500.000000
8/19/2012	1:22:23 PM	H2 MFC set to  0.000000
8/19/2012	1:22:23 PM	BCl3 MFC set to  0.000000
8/19/2012	1:22:23 PM	PH3 MFC set to  0.000000
8/19/2012	1:22:23 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:22:23 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:22:23 PM	Tube furnace set to 0
8/19/2012	1:23:31 PM	Helium valve closed
8/19/2012	1:23:31 PM	H2 valve closed
8/19/2012	1:23:31 PM	BCl3 valve closed
8/19/2012	1:23:31 PM	PH3 valve closed
8/19/2012	1:23:31 PM	SiCl4 pre valve closed
8/19/2012	1:23:31 PM	SiCl4 post valve closed
8/19/2012	1:23:31 PM	Main Vac valve closed
8/19/2012	1:23:31 PM	Bypass valve closed
8/19/2012	1:23:31 PM	Bubbler valve closed
8/19/2012	1:23:31 PM	Helium MFC set to  0.000000
8/19/2012	1:23:31 PM	H2 MFC set to  0.000000
8/19/2012	1:23:31 PM	BCl3 MFC set to  0.000000
8/19/2012	1:23:31 PM	PH3 MFC set to  0.000000
8/19/2012	1:23:31 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:23:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:23:32 PM	Tube furnace set to 0
8/19/2012	1:23:33 PM	Run finished at 1:23 PM
8/19/2012	1:23:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	1:29:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	1:29:10 PM	Recipe started at 1:29 PM
8/19/2012	1:29:10 PM	Helium valve closed
8/19/2012	1:29:10 PM	H2 valve closed
8/19/2012	1:29:10 PM	BCl3 valve closed
8/19/2012	1:29:10 PM	PH3 valve closed
8/19/2012	1:29:10 PM	SiCl4 pre valve closed
8/19/2012	1:29:10 PM	SiCl4 post valve closed
8/19/2012	1:29:10 PM	Main Vac valve closed
8/19/2012	1:29:10 PM	Bubbler valve closed
8/19/2012	1:29:10 PM	Bypass valve opened
8/19/2012	1:29:10 PM	Helium MFC set to  0.000000
8/19/2012	1:29:10 PM	H2 MFC set to  0.000000
8/19/2012	1:29:10 PM	BCl3 MFC set to  0.000000
8/19/2012	1:29:10 PM	PH3 MFC set to  0.000000
8/19/2012	1:29:10 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:29:10 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:29:10 PM	Tube furnace set to 0
8/19/2012	1:30:31 PM	Helium valve closed
8/19/2012	1:30:31 PM	H2 valve closed
8/19/2012	1:30:31 PM	BCl3 valve closed
8/19/2012	1:30:31 PM	PH3 valve closed
8/19/2012	1:30:31 PM	SiCl4 pre valve closed
8/19/2012	1:30:31 PM	SiCl4 post valve closed
8/19/2012	1:30:31 PM	Main Vac valve closed
8/19/2012	1:30:31 PM	Bubbler valve closed
8/19/2012	1:30:31 PM	Bypass valve opened
8/19/2012	1:30:31 PM	Helium MFC set to  0.000000
8/19/2012	1:30:31 PM	H2 MFC set to  0.000000
8/19/2012	1:30:31 PM	BCl3 MFC set to  0.000000
8/19/2012	1:30:31 PM	PH3 MFC set to  0.000000
8/19/2012	1:30:31 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:30:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:30:31 PM	Tube furnace set to 0
8/19/2012	1:31:31 PM	Helium valve closed
8/19/2012	1:31:31 PM	H2 valve closed
8/19/2012	1:31:31 PM	BCl3 valve closed
8/19/2012	1:31:31 PM	PH3 valve closed
8/19/2012	1:31:31 PM	SiCl4 pre valve closed
8/19/2012	1:31:31 PM	SiCl4 post valve closed
8/19/2012	1:31:31 PM	Bypass valve closed
8/19/2012	1:31:31 PM	Bubbler valve closed
8/19/2012	1:31:31 PM	Main Vac valve opened
8/19/2012	1:31:31 PM	Helium MFC set to  0.000000
8/19/2012	1:31:31 PM	H2 MFC set to  0.000000
8/19/2012	1:31:31 PM	BCl3 MFC set to  0.000000
8/19/2012	1:31:31 PM	PH3 MFC set to  0.000000
8/19/2012	1:31:31 PM	SiCl4 MFC set to  0.000000
8/19/2012	1:31:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	1:31:31 PM	Tube furnace set to 0
8/19/2012	1:31:32 PM	Run finished at 1:31 PM
8/19/2012	1:31:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	3:04:30 PM	Recipe started at 3:04 PM
8/19/2012	3:04:30 PM	Helium valve closed
8/19/2012	3:04:30 PM	H2 valve closed
8/19/2012	3:04:30 PM	BCl3 valve closed
8/19/2012	3:04:30 PM	PH3 valve closed
8/19/2012	3:04:30 PM	SiCl4 pre valve closed
8/19/2012	3:04:30 PM	SiCl4 post valve closed
8/19/2012	3:04:30 PM	Main Vac valve closed
8/19/2012	3:04:30 PM	Bypass valve closed
8/19/2012	3:04:30 PM	Bubbler valve closed
8/19/2012	3:04:30 PM	Helium MFC set to  0.000000
8/19/2012	3:04:30 PM	H2 MFC set to  0.000000
8/19/2012	3:04:30 PM	BCl3 MFC set to  0.000000
8/19/2012	3:04:30 PM	PH3 MFC set to  0.000000
8/19/2012	3:04:30 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:04:30 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:04:30 PM	Tube furnace set to 0
8/19/2012	3:04:33 PM	Helium valve closed
8/19/2012	3:04:33 PM	BCl3 valve closed
8/19/2012	3:04:33 PM	PH3 valve closed
8/19/2012	3:04:33 PM	SiCl4 pre valve closed
8/19/2012	3:04:33 PM	SiCl4 post valve closed
8/19/2012	3:04:33 PM	Main Vac valve closed
8/19/2012	3:04:33 PM	Bypass valve closed
8/19/2012	3:04:33 PM	Bubbler valve closed
8/19/2012	3:04:33 PM	H2 valve opened
8/19/2012	3:04:33 PM	Helium MFC set to  0.000000
8/19/2012	3:04:33 PM	H2 MFC set to  500.000000
8/19/2012	3:04:33 PM	BCl3 MFC set to  0.000000
8/19/2012	3:04:33 PM	PH3 MFC set to  0.000000
8/19/2012	3:04:33 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:04:33 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:04:33 PM	Tube furnace set to 50
8/19/2012	3:05:45 PM	Helium valve closed
8/19/2012	3:05:45 PM	BCl3 valve closed
8/19/2012	3:05:45 PM	PH3 valve closed
8/19/2012	3:05:45 PM	SiCl4 pre valve closed
8/19/2012	3:05:45 PM	SiCl4 post valve closed
8/19/2012	3:05:45 PM	Main Vac valve closed
8/19/2012	3:05:45 PM	Bypass valve closed
8/19/2012	3:05:45 PM	H2 valve opened
8/19/2012	3:05:45 PM	Bubbler valve opened
8/19/2012	3:05:45 PM	Helium MFC set to  0.000000
8/19/2012	3:05:45 PM	H2 MFC set to  500.000000
8/19/2012	3:05:45 PM	BCl3 MFC set to  0.000000
8/19/2012	3:05:45 PM	PH3 MFC set to  0.000000
8/19/2012	3:05:45 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:05:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:05:45 PM	Tube furnace set to 50
8/19/2012	3:05:46 PM	Helium valve closed
8/19/2012	3:05:46 PM	BCl3 valve closed
8/19/2012	3:05:46 PM	PH3 valve closed
8/19/2012	3:05:46 PM	SiCl4 pre valve closed
8/19/2012	3:05:46 PM	SiCl4 post valve closed
8/19/2012	3:05:46 PM	Main Vac valve closed
8/19/2012	3:05:47 PM	Bypass valve closed
8/19/2012	3:05:47 PM	H2 valve opened
8/19/2012	3:05:47 PM	Bubbler valve opened
8/19/2012	3:05:47 PM	Helium MFC set to  0.000000
8/19/2012	3:05:47 PM	H2 MFC set to  500.000000
8/19/2012	3:05:47 PM	BCl3 MFC set to  0.000000
8/19/2012	3:05:47 PM	PH3 MFC set to  0.000000
8/19/2012	3:05:47 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:05:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:05:47 PM	Tube furnace set to 1000
8/19/2012	3:25:47 PM	Helium valve closed
8/19/2012	3:25:47 PM	PH3 valve closed
8/19/2012	3:25:47 PM	Main Vac valve closed
8/19/2012	3:25:47 PM	Bypass valve closed
8/19/2012	3:25:47 PM	H2 valve opened
8/19/2012	3:25:47 PM	BCl3 valve opened
8/19/2012	3:25:47 PM	SiCl4 pre valve opened
8/19/2012	3:25:47 PM	SiCl4 post valve opened
8/19/2012	3:25:47 PM	Bubbler valve opened
8/19/2012	3:25:47 PM	Helium MFC set to  0.000000
8/19/2012	3:25:47 PM	H2 MFC set to  500.000000
8/19/2012	3:25:47 PM	BCl3 MFC set to  1.000000
8/19/2012	3:25:47 PM	PH3 MFC set to  0.000000
8/19/2012	3:25:47 PM	SiCl4 MFC set to  50.000000
8/19/2012	3:25:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:25:47 PM	Tube furnace set to 1000
8/19/2012	3:45:47 PM	Helium valve closed
8/19/2012	3:45:47 PM	BCl3 valve closed
8/19/2012	3:45:47 PM	PH3 valve closed
8/19/2012	3:45:47 PM	SiCl4 pre valve closed
8/19/2012	3:45:47 PM	SiCl4 post valve closed
8/19/2012	3:45:47 PM	Main Vac valve closed
8/19/2012	3:45:47 PM	Bypass valve closed
8/19/2012	3:45:47 PM	H2 valve opened
8/19/2012	3:45:47 PM	Bubbler valve opened
8/19/2012	3:45:47 PM	Helium MFC set to  0.000000
8/19/2012	3:45:47 PM	H2 MFC set to  500.000000
8/19/2012	3:45:47 PM	BCl3 MFC set to  0.000000
8/19/2012	3:45:47 PM	PH3 MFC set to  0.000000
8/19/2012	3:45:47 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:45:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:45:47 PM	Tube furnace set to 950
8/19/2012	3:48:47 PM	Helium valve closed
8/19/2012	3:48:47 PM	BCl3 valve closed
8/19/2012	3:48:47 PM	PH3 valve closed
8/19/2012	3:48:47 PM	SiCl4 pre valve closed
8/19/2012	3:48:47 PM	SiCl4 post valve closed
8/19/2012	3:48:47 PM	Main Vac valve closed
8/19/2012	3:48:47 PM	Bypass valve closed
8/19/2012	3:48:47 PM	H2 valve opened
8/19/2012	3:48:47 PM	Bubbler valve opened
8/19/2012	3:48:47 PM	Helium MFC set to  0.000000
8/19/2012	3:48:47 PM	H2 MFC set to  500.000000
8/19/2012	3:48:47 PM	BCl3 MFC set to  0.000000
8/19/2012	3:48:47 PM	PH3 MFC set to  0.000000
8/19/2012	3:48:47 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:48:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:48:47 PM	Tube furnace set to 900
8/19/2012	3:51:47 PM	Helium valve closed
8/19/2012	3:51:47 PM	BCl3 valve closed
8/19/2012	3:51:47 PM	PH3 valve closed
8/19/2012	3:51:47 PM	SiCl4 pre valve closed
8/19/2012	3:51:47 PM	SiCl4 post valve closed
8/19/2012	3:51:47 PM	Main Vac valve closed
8/19/2012	3:51:47 PM	Bypass valve closed
8/19/2012	3:51:47 PM	H2 valve opened
8/19/2012	3:51:47 PM	Bubbler valve opened
8/19/2012	3:51:47 PM	Helium MFC set to  0.000000
8/19/2012	3:51:47 PM	H2 MFC set to  500.000000
8/19/2012	3:51:47 PM	BCl3 MFC set to  0.000000
8/19/2012	3:51:47 PM	PH3 MFC set to  0.000000
8/19/2012	3:51:47 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:51:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:51:48 PM	Tube furnace set to 850
8/19/2012	3:54:48 PM	Helium valve closed
8/19/2012	3:54:48 PM	BCl3 valve closed
8/19/2012	3:54:48 PM	PH3 valve closed
8/19/2012	3:54:48 PM	SiCl4 pre valve closed
8/19/2012	3:54:48 PM	SiCl4 post valve closed
8/19/2012	3:54:48 PM	Main Vac valve closed
8/19/2012	3:54:48 PM	Bypass valve closed
8/19/2012	3:54:48 PM	H2 valve opened
8/19/2012	3:54:48 PM	Bubbler valve opened
8/19/2012	3:54:48 PM	Helium MFC set to  0.000000
8/19/2012	3:54:48 PM	H2 MFC set to  500.000000
8/19/2012	3:54:48 PM	BCl3 MFC set to  0.000000
8/19/2012	3:54:48 PM	PH3 MFC set to  0.000000
8/19/2012	3:54:48 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:54:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:54:48 PM	Tube furnace set to 800
8/19/2012	3:57:48 PM	Helium valve closed
8/19/2012	3:57:48 PM	BCl3 valve closed
8/19/2012	3:57:48 PM	PH3 valve closed
8/19/2012	3:57:48 PM	SiCl4 pre valve closed
8/19/2012	3:57:48 PM	SiCl4 post valve closed
8/19/2012	3:57:48 PM	Main Vac valve closed
8/19/2012	3:57:48 PM	Bypass valve closed
8/19/2012	3:57:48 PM	H2 valve opened
8/19/2012	3:57:48 PM	Bubbler valve opened
8/19/2012	3:57:48 PM	Helium MFC set to  0.000000
8/19/2012	3:57:48 PM	H2 MFC set to  500.000000
8/19/2012	3:57:48 PM	BCl3 MFC set to  0.000000
8/19/2012	3:57:48 PM	PH3 MFC set to  0.000000
8/19/2012	3:57:48 PM	SiCl4 MFC set to  0.000000
8/19/2012	3:57:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	3:57:48 PM	Tube furnace set to 750
8/19/2012	4:00:48 PM	H2 valve closed
8/19/2012	4:00:48 PM	BCl3 valve closed
8/19/2012	4:00:48 PM	PH3 valve closed
8/19/2012	4:00:48 PM	SiCl4 pre valve closed
8/19/2012	4:00:48 PM	SiCl4 post valve closed
8/19/2012	4:00:48 PM	Main Vac valve closed
8/19/2012	4:00:48 PM	Bypass valve closed
8/19/2012	4:00:48 PM	Helium valve opened
8/19/2012	4:00:48 PM	Bubbler valve opened
8/19/2012	4:00:48 PM	Helium MFC set to  400.000000
8/19/2012	4:00:48 PM	H2 MFC set to  0.000000
8/19/2012	4:00:48 PM	BCl3 MFC set to  0.000000
8/19/2012	4:00:48 PM	PH3 MFC set to  0.000000
8/19/2012	4:00:48 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:00:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:00:48 PM	Tube furnace set to 0
8/19/2012	4:09:41 PM	Helium valve closed
8/19/2012	4:09:41 PM	H2 valve closed
8/19/2012	4:09:41 PM	BCl3 valve closed
8/19/2012	4:09:41 PM	PH3 valve closed
8/19/2012	4:09:41 PM	SiCl4 pre valve closed
8/19/2012	4:09:41 PM	SiCl4 post valve closed
8/19/2012	4:09:41 PM	Main Vac valve closed
8/19/2012	4:09:41 PM	Bypass valve closed
8/19/2012	4:09:41 PM	Bubbler valve closed
8/19/2012	4:09:41 PM	Helium MFC set to  0.000000
8/19/2012	4:09:41 PM	H2 MFC set to  0.000000
8/19/2012	4:09:41 PM	BCl3 MFC set to  0.000000
8/19/2012	4:09:41 PM	PH3 MFC set to  0.000000
8/19/2012	4:09:41 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:09:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:09:41 PM	Tube furnace set to 50
8/19/2012	4:09:42 PM	Helium valve closed
8/19/2012	4:09:42 PM	H2 valve closed
8/19/2012	4:09:42 PM	BCl3 valve closed
8/19/2012	4:09:42 PM	PH3 valve closed
8/19/2012	4:09:42 PM	SiCl4 pre valve closed
8/19/2012	4:09:42 PM	SiCl4 post valve closed
8/19/2012	4:09:42 PM	Main Vac valve closed
8/19/2012	4:09:42 PM	Bubbler valve closed
8/19/2012	4:09:42 PM	Bypass valve opened
8/19/2012	4:09:42 PM	Helium MFC set to  0.000000
8/19/2012	4:09:42 PM	H2 MFC set to  0.000000
8/19/2012	4:09:42 PM	BCl3 MFC set to  0.000000
8/19/2012	4:09:42 PM	PH3 MFC set to  0.000000
8/19/2012	4:09:42 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:09:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:09:42 PM	Tube furnace set to 0
8/19/2012	4:10:40 PM	Helium valve closed
8/19/2012	4:10:40 PM	H2 valve closed
8/19/2012	4:10:40 PM	BCl3 valve closed
8/19/2012	4:10:40 PM	PH3 valve closed
8/19/2012	4:10:40 PM	SiCl4 pre valve closed
8/19/2012	4:10:40 PM	SiCl4 post valve closed
8/19/2012	4:10:40 PM	Bypass valve closed
8/19/2012	4:10:40 PM	Bubbler valve closed
8/19/2012	4:10:40 PM	Main Vac valve opened
8/19/2012	4:10:40 PM	Helium MFC set to  0.000000
8/19/2012	4:10:40 PM	H2 MFC set to  0.000000
8/19/2012	4:10:40 PM	BCl3 MFC set to  0.000000
8/19/2012	4:10:40 PM	PH3 MFC set to  0.000000
8/19/2012	4:10:40 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:10:40 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:10:41 PM	Tube furnace set to 0
8/19/2012	4:10:42 PM	Run finished at 4:10 PM
8/19/2012	4:10:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	4:10:46 PM	Recipe started at 4:10 PM
8/19/2012	4:10:46 PM	Helium valve closed
8/19/2012	4:10:46 PM	H2 valve closed
8/19/2012	4:10:46 PM	BCl3 valve closed
8/19/2012	4:10:46 PM	PH3 valve closed
8/19/2012	4:10:46 PM	SiCl4 pre valve closed
8/19/2012	4:10:46 PM	SiCl4 post valve closed
8/19/2012	4:10:46 PM	Main Vac valve closed
8/19/2012	4:10:46 PM	Bypass valve closed
8/19/2012	4:10:46 PM	Bubbler valve closed
8/19/2012	4:10:46 PM	Helium MFC set to  0.000000
8/19/2012	4:10:46 PM	H2 MFC set to  0.000000
8/19/2012	4:10:46 PM	BCl3 MFC set to  0.000000
8/19/2012	4:10:46 PM	PH3 MFC set to  0.000000
8/19/2012	4:10:46 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:10:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:10:46 PM	Tube furnace set to 0
8/19/2012	4:10:49 PM	H2 valve closed
8/19/2012	4:10:49 PM	BCl3 valve closed
8/19/2012	4:10:49 PM	PH3 valve closed
8/19/2012	4:10:49 PM	SiCl4 pre valve closed
8/19/2012	4:10:49 PM	SiCl4 post valve closed
8/19/2012	4:10:49 PM	Main Vac valve closed
8/19/2012	4:10:49 PM	Bypass valve closed
8/19/2012	4:10:49 PM	Bubbler valve closed
8/19/2012	4:10:49 PM	Helium valve opened
8/19/2012	4:10:49 PM	Helium MFC set to  500.000000
8/19/2012	4:10:49 PM	H2 MFC set to  0.000000
8/19/2012	4:10:49 PM	BCl3 MFC set to  0.000000
8/19/2012	4:10:49 PM	PH3 MFC set to  0.000000
8/19/2012	4:10:49 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:10:49 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:10:49 PM	Tube furnace set to 0
8/19/2012	4:11:57 PM	Helium valve closed
8/19/2012	4:11:57 PM	H2 valve closed
8/19/2012	4:11:57 PM	BCl3 valve closed
8/19/2012	4:11:57 PM	PH3 valve closed
8/19/2012	4:11:57 PM	SiCl4 pre valve closed
8/19/2012	4:11:57 PM	SiCl4 post valve closed
8/19/2012	4:11:57 PM	Main Vac valve closed
8/19/2012	4:11:57 PM	Bypass valve closed
8/19/2012	4:11:57 PM	Bubbler valve closed
8/19/2012	4:11:57 PM	Helium MFC set to  0.000000
8/19/2012	4:11:57 PM	H2 MFC set to  0.000000
8/19/2012	4:11:57 PM	BCl3 MFC set to  0.000000
8/19/2012	4:11:57 PM	PH3 MFC set to  0.000000
8/19/2012	4:11:57 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:11:57 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:11:57 PM	Tube furnace set to 0
8/19/2012	4:11:58 PM	Run finished at 4:11 PM
8/19/2012	4:11:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	4:18:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	4:18:40 PM	Recipe started at 4:18 PM
8/19/2012	4:18:40 PM	Helium valve closed
8/19/2012	4:18:40 PM	H2 valve closed
8/19/2012	4:18:40 PM	BCl3 valve closed
8/19/2012	4:18:40 PM	PH3 valve closed
8/19/2012	4:18:40 PM	SiCl4 pre valve closed
8/19/2012	4:18:40 PM	SiCl4 post valve closed
8/19/2012	4:18:40 PM	Main Vac valve closed
8/19/2012	4:18:40 PM	Bubbler valve closed
8/19/2012	4:18:40 PM	Bypass valve opened
8/19/2012	4:18:40 PM	Helium MFC set to  0.000000
8/19/2012	4:18:40 PM	H2 MFC set to  0.000000
8/19/2012	4:18:40 PM	BCl3 MFC set to  0.000000
8/19/2012	4:18:40 PM	PH3 MFC set to  0.000000
8/19/2012	4:18:40 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:18:40 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:18:41 PM	Tube furnace set to 0
8/19/2012	4:20:04 PM	Helium valve closed
8/19/2012	4:20:04 PM	H2 valve closed
8/19/2012	4:20:04 PM	BCl3 valve closed
8/19/2012	4:20:04 PM	PH3 valve closed
8/19/2012	4:20:04 PM	SiCl4 pre valve closed
8/19/2012	4:20:04 PM	SiCl4 post valve closed
8/19/2012	4:20:04 PM	Main Vac valve closed
8/19/2012	4:20:04 PM	Bubbler valve closed
8/19/2012	4:20:04 PM	Bypass valve opened
8/19/2012	4:20:04 PM	Helium MFC set to  0.000000
8/19/2012	4:20:04 PM	H2 MFC set to  0.000000
8/19/2012	4:20:04 PM	BCl3 MFC set to  0.000000
8/19/2012	4:20:04 PM	PH3 MFC set to  0.000000
8/19/2012	4:20:04 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:20:04 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:20:04 PM	Tube furnace set to 0
8/19/2012	4:21:04 PM	Helium valve closed
8/19/2012	4:21:04 PM	H2 valve closed
8/19/2012	4:21:04 PM	BCl3 valve closed
8/19/2012	4:21:04 PM	PH3 valve closed
8/19/2012	4:21:04 PM	SiCl4 pre valve closed
8/19/2012	4:21:04 PM	SiCl4 post valve closed
8/19/2012	4:21:04 PM	Bypass valve closed
8/19/2012	4:21:04 PM	Bubbler valve closed
8/19/2012	4:21:04 PM	Main Vac valve opened
8/19/2012	4:21:04 PM	Helium MFC set to  0.000000
8/19/2012	4:21:04 PM	H2 MFC set to  0.000000
8/19/2012	4:21:04 PM	BCl3 MFC set to  0.000000
8/19/2012	4:21:04 PM	PH3 MFC set to  0.000000
8/19/2012	4:21:04 PM	SiCl4 MFC set to  0.000000
8/19/2012	4:21:04 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	4:21:04 PM	Tube furnace set to 0
8/19/2012	4:21:05 PM	Run finished at 4:21 PM
8/19/2012	4:21:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	5:45:27 PM	Recipe started at 5:45 PM
8/19/2012	5:45:27 PM	Helium valve closed
8/19/2012	5:45:27 PM	H2 valve closed
8/19/2012	5:45:27 PM	BCl3 valve closed
8/19/2012	5:45:27 PM	PH3 valve closed
8/19/2012	5:45:27 PM	SiCl4 pre valve closed
8/19/2012	5:45:27 PM	SiCl4 post valve closed
8/19/2012	5:45:27 PM	Main Vac valve closed
8/19/2012	5:45:27 PM	Bypass valve closed
8/19/2012	5:45:27 PM	Bubbler valve closed
8/19/2012	5:45:27 PM	Helium MFC set to  0.000000
8/19/2012	5:45:27 PM	H2 MFC set to  0.000000
8/19/2012	5:45:27 PM	BCl3 MFC set to  0.000000
8/19/2012	5:45:27 PM	PH3 MFC set to  0.000000
8/19/2012	5:45:27 PM	SiCl4 MFC set to  0.000000
8/19/2012	5:45:27 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	5:45:27 PM	Tube furnace set to 0
8/19/2012	5:45:30 PM	Helium valve closed
8/19/2012	5:45:30 PM	BCl3 valve closed
8/19/2012	5:45:30 PM	PH3 valve closed
8/19/2012	5:45:30 PM	SiCl4 pre valve closed
8/19/2012	5:45:30 PM	SiCl4 post valve closed
8/19/2012	5:45:30 PM	Main Vac valve closed
8/19/2012	5:45:31 PM	Bypass valve closed
8/19/2012	5:45:31 PM	Bubbler valve closed
8/19/2012	5:45:31 PM	H2 valve opened
8/19/2012	5:45:31 PM	Helium MFC set to  0.000000
8/19/2012	5:45:31 PM	H2 MFC set to  500.000000
8/19/2012	5:45:31 PM	BCl3 MFC set to  0.000000
8/19/2012	5:45:31 PM	PH3 MFC set to  0.000000
8/19/2012	5:45:31 PM	SiCl4 MFC set to  0.000000
8/19/2012	5:45:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	5:45:31 PM	Tube furnace set to 50
8/19/2012	5:46:43 PM	Helium valve closed
8/19/2012	5:46:43 PM	BCl3 valve closed
8/19/2012	5:46:43 PM	PH3 valve closed
8/19/2012	5:46:43 PM	SiCl4 pre valve closed
8/19/2012	5:46:43 PM	SiCl4 post valve closed
8/19/2012	5:46:43 PM	Main Vac valve closed
8/19/2012	5:46:43 PM	Bypass valve closed
8/19/2012	5:46:43 PM	H2 valve opened
8/19/2012	5:46:43 PM	Bubbler valve opened
8/19/2012	5:46:43 PM	Helium MFC set to  0.000000
8/19/2012	5:46:43 PM	H2 MFC set to  500.000000
8/19/2012	5:46:43 PM	BCl3 MFC set to  0.000000
8/19/2012	5:46:43 PM	PH3 MFC set to  0.000000
8/19/2012	5:46:43 PM	SiCl4 MFC set to  0.000000
8/19/2012	5:46:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	5:46:43 PM	Tube furnace set to 50
8/19/2012	5:46:44 PM	Helium valve closed
8/19/2012	5:46:44 PM	BCl3 valve closed
8/19/2012	5:46:44 PM	PH3 valve closed
8/19/2012	5:46:44 PM	SiCl4 pre valve closed
8/19/2012	5:46:44 PM	SiCl4 post valve closed
8/19/2012	5:46:44 PM	Main Vac valve closed
8/19/2012	5:46:44 PM	Bypass valve closed
8/19/2012	5:46:44 PM	H2 valve opened
8/19/2012	5:46:44 PM	Bubbler valve opened
8/19/2012	5:46:44 PM	Helium MFC set to  0.000000
8/19/2012	5:46:44 PM	H2 MFC set to  500.000000
8/19/2012	5:46:44 PM	BCl3 MFC set to  0.000000
8/19/2012	5:46:44 PM	PH3 MFC set to  0.000000
8/19/2012	5:46:44 PM	SiCl4 MFC set to  0.000000
8/19/2012	5:46:44 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	5:46:44 PM	Tube furnace set to 1000
8/19/2012	6:06:44 PM	Helium valve closed
8/19/2012	6:06:44 PM	PH3 valve closed
8/19/2012	6:06:44 PM	Main Vac valve closed
8/19/2012	6:06:44 PM	Bypass valve closed
8/19/2012	6:06:44 PM	H2 valve opened
8/19/2012	6:06:44 PM	BCl3 valve opened
8/19/2012	6:06:45 PM	SiCl4 pre valve opened
8/19/2012	6:06:45 PM	SiCl4 post valve opened
8/19/2012	6:06:45 PM	Bubbler valve opened
8/19/2012	6:06:45 PM	Helium MFC set to  0.000000
8/19/2012	6:06:45 PM	H2 MFC set to  500.000000
8/19/2012	6:06:45 PM	BCl3 MFC set to  1.000000
8/19/2012	6:06:45 PM	PH3 MFC set to  0.000000
8/19/2012	6:06:45 PM	SiCl4 MFC set to  50.000000
8/19/2012	6:06:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:06:45 PM	Tube furnace set to 1000
8/19/2012	6:26:45 PM	Helium valve closed
8/19/2012	6:26:45 PM	BCl3 valve closed
8/19/2012	6:26:45 PM	PH3 valve closed
8/19/2012	6:26:45 PM	SiCl4 pre valve closed
8/19/2012	6:26:45 PM	SiCl4 post valve closed
8/19/2012	6:26:45 PM	Main Vac valve closed
8/19/2012	6:26:45 PM	Bypass valve closed
8/19/2012	6:26:45 PM	H2 valve opened
8/19/2012	6:26:45 PM	Bubbler valve opened
8/19/2012	6:26:45 PM	Helium MFC set to  0.000000
8/19/2012	6:26:45 PM	H2 MFC set to  500.000000
8/19/2012	6:26:45 PM	BCl3 MFC set to  0.000000
8/19/2012	6:26:45 PM	PH3 MFC set to  0.000000
8/19/2012	6:26:45 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:26:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:26:45 PM	Tube furnace set to 950
8/19/2012	6:29:45 PM	Helium valve closed
8/19/2012	6:29:45 PM	BCl3 valve closed
8/19/2012	6:29:45 PM	PH3 valve closed
8/19/2012	6:29:45 PM	SiCl4 pre valve closed
8/19/2012	6:29:45 PM	SiCl4 post valve closed
8/19/2012	6:29:45 PM	Main Vac valve closed
8/19/2012	6:29:45 PM	Bypass valve closed
8/19/2012	6:29:45 PM	H2 valve opened
8/19/2012	6:29:45 PM	Bubbler valve opened
8/19/2012	6:29:45 PM	Helium MFC set to  0.000000
8/19/2012	6:29:45 PM	H2 MFC set to  500.000000
8/19/2012	6:29:45 PM	BCl3 MFC set to  0.000000
8/19/2012	6:29:45 PM	PH3 MFC set to  0.000000
8/19/2012	6:29:45 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:29:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:29:45 PM	Tube furnace set to 900
8/19/2012	6:32:45 PM	Helium valve closed
8/19/2012	6:32:45 PM	BCl3 valve closed
8/19/2012	6:32:45 PM	PH3 valve closed
8/19/2012	6:32:45 PM	SiCl4 pre valve closed
8/19/2012	6:32:45 PM	SiCl4 post valve closed
8/19/2012	6:32:45 PM	Main Vac valve closed
8/19/2012	6:32:45 PM	Bypass valve closed
8/19/2012	6:32:45 PM	H2 valve opened
8/19/2012	6:32:45 PM	Bubbler valve opened
8/19/2012	6:32:45 PM	Helium MFC set to  0.000000
8/19/2012	6:32:45 PM	H2 MFC set to  500.000000
8/19/2012	6:32:45 PM	BCl3 MFC set to  0.000000
8/19/2012	6:32:45 PM	PH3 MFC set to  0.000000
8/19/2012	6:32:45 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:32:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:32:45 PM	Tube furnace set to 850
8/19/2012	6:35:45 PM	Helium valve closed
8/19/2012	6:35:45 PM	BCl3 valve closed
8/19/2012	6:35:45 PM	PH3 valve closed
8/19/2012	6:35:45 PM	SiCl4 pre valve closed
8/19/2012	6:35:45 PM	SiCl4 post valve closed
8/19/2012	6:35:45 PM	Main Vac valve closed
8/19/2012	6:35:45 PM	Bypass valve closed
8/19/2012	6:35:45 PM	H2 valve opened
8/19/2012	6:35:45 PM	Bubbler valve opened
8/19/2012	6:35:45 PM	Helium MFC set to  0.000000
8/19/2012	6:35:45 PM	H2 MFC set to  500.000000
8/19/2012	6:35:45 PM	BCl3 MFC set to  0.000000
8/19/2012	6:35:45 PM	PH3 MFC set to  0.000000
8/19/2012	6:35:45 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:35:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:35:46 PM	Tube furnace set to 800
8/19/2012	6:38:46 PM	Helium valve closed
8/19/2012	6:38:46 PM	BCl3 valve closed
8/19/2012	6:38:46 PM	PH3 valve closed
8/19/2012	6:38:46 PM	SiCl4 pre valve closed
8/19/2012	6:38:46 PM	SiCl4 post valve closed
8/19/2012	6:38:46 PM	Main Vac valve closed
8/19/2012	6:38:46 PM	Bypass valve closed
8/19/2012	6:38:46 PM	H2 valve opened
8/19/2012	6:38:46 PM	Bubbler valve opened
8/19/2012	6:38:46 PM	Helium MFC set to  0.000000
8/19/2012	6:38:46 PM	H2 MFC set to  500.000000
8/19/2012	6:38:46 PM	BCl3 MFC set to  0.000000
8/19/2012	6:38:46 PM	PH3 MFC set to  0.000000
8/19/2012	6:38:46 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:38:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:38:46 PM	Tube furnace set to 750
8/19/2012	6:41:46 PM	H2 valve closed
8/19/2012	6:41:46 PM	BCl3 valve closed
8/19/2012	6:41:46 PM	PH3 valve closed
8/19/2012	6:41:46 PM	SiCl4 pre valve closed
8/19/2012	6:41:46 PM	SiCl4 post valve closed
8/19/2012	6:41:46 PM	Main Vac valve closed
8/19/2012	6:41:46 PM	Bypass valve closed
8/19/2012	6:41:46 PM	Helium valve opened
8/19/2012	6:41:46 PM	Bubbler valve opened
8/19/2012	6:41:46 PM	Helium MFC set to  400.000000
8/19/2012	6:41:46 PM	H2 MFC set to  0.000000
8/19/2012	6:41:46 PM	BCl3 MFC set to  0.000000
8/19/2012	6:41:46 PM	PH3 MFC set to  0.000000
8/19/2012	6:41:46 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:41:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:41:46 PM	Tube furnace set to 0
8/19/2012	6:53:12 PM	Helium valve closed
8/19/2012	6:53:12 PM	H2 valve closed
8/19/2012	6:53:12 PM	BCl3 valve closed
8/19/2012	6:53:12 PM	PH3 valve closed
8/19/2012	6:53:12 PM	SiCl4 pre valve closed
8/19/2012	6:53:12 PM	SiCl4 post valve closed
8/19/2012	6:53:12 PM	Main Vac valve closed
8/19/2012	6:53:12 PM	Bypass valve closed
8/19/2012	6:53:12 PM	Bubbler valve closed
8/19/2012	6:53:12 PM	Helium MFC set to  0.000000
8/19/2012	6:53:12 PM	H2 MFC set to  0.000000
8/19/2012	6:53:12 PM	BCl3 MFC set to  0.000000
8/19/2012	6:53:12 PM	PH3 MFC set to  0.000000
8/19/2012	6:53:12 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:53:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:53:13 PM	Tube furnace set to 50
8/19/2012	6:53:13 PM	Helium valve closed
8/19/2012	6:53:13 PM	H2 valve closed
8/19/2012	6:53:13 PM	BCl3 valve closed
8/19/2012	6:53:13 PM	PH3 valve closed
8/19/2012	6:53:13 PM	SiCl4 pre valve closed
8/19/2012	6:53:13 PM	SiCl4 post valve closed
8/19/2012	6:53:13 PM	Main Vac valve closed
8/19/2012	6:53:13 PM	Bubbler valve closed
8/19/2012	6:53:13 PM	Bypass valve opened
8/19/2012	6:53:13 PM	Helium MFC set to  0.000000
8/19/2012	6:53:13 PM	H2 MFC set to  0.000000
8/19/2012	6:53:13 PM	BCl3 MFC set to  0.000000
8/19/2012	6:53:13 PM	PH3 MFC set to  0.000000
8/19/2012	6:53:13 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:53:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:53:14 PM	Tube furnace set to 0
8/19/2012	6:54:12 PM	Helium valve closed
8/19/2012	6:54:12 PM	H2 valve closed
8/19/2012	6:54:12 PM	BCl3 valve closed
8/19/2012	6:54:12 PM	PH3 valve closed
8/19/2012	6:54:12 PM	SiCl4 pre valve closed
8/19/2012	6:54:12 PM	SiCl4 post valve closed
8/19/2012	6:54:12 PM	Bypass valve closed
8/19/2012	6:54:12 PM	Bubbler valve closed
8/19/2012	6:54:12 PM	Main Vac valve opened
8/19/2012	6:54:12 PM	Helium MFC set to  0.000000
8/19/2012	6:54:12 PM	H2 MFC set to  0.000000
8/19/2012	6:54:12 PM	BCl3 MFC set to  0.000000
8/19/2012	6:54:12 PM	PH3 MFC set to  0.000000
8/19/2012	6:54:12 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:54:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:54:12 PM	Tube furnace set to 0
8/19/2012	6:54:13 PM	Run finished at 6:54 PM
8/19/2012	6:54:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	6:54:19 PM	Recipe started at 6:54 PM
8/19/2012	6:54:19 PM	Helium valve closed
8/19/2012	6:54:19 PM	H2 valve closed
8/19/2012	6:54:19 PM	BCl3 valve closed
8/19/2012	6:54:19 PM	PH3 valve closed
8/19/2012	6:54:19 PM	SiCl4 pre valve closed
8/19/2012	6:54:19 PM	SiCl4 post valve closed
8/19/2012	6:54:19 PM	Main Vac valve closed
8/19/2012	6:54:19 PM	Bypass valve closed
8/19/2012	6:54:19 PM	Bubbler valve closed
8/19/2012	6:54:19 PM	Helium MFC set to  0.000000
8/19/2012	6:54:19 PM	H2 MFC set to  0.000000
8/19/2012	6:54:19 PM	BCl3 MFC set to  0.000000
8/19/2012	6:54:19 PM	PH3 MFC set to  0.000000
8/19/2012	6:54:19 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:54:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:54:19 PM	Tube furnace set to 0
8/19/2012	6:54:22 PM	H2 valve closed
8/19/2012	6:54:22 PM	BCl3 valve closed
8/19/2012	6:54:22 PM	PH3 valve closed
8/19/2012	6:54:22 PM	SiCl4 pre valve closed
8/19/2012	6:54:22 PM	SiCl4 post valve closed
8/19/2012	6:54:22 PM	Main Vac valve closed
8/19/2012	6:54:22 PM	Bypass valve closed
8/19/2012	6:54:22 PM	Bubbler valve closed
8/19/2012	6:54:22 PM	Helium valve opened
8/19/2012	6:54:22 PM	Helium MFC set to  500.000000
8/19/2012	6:54:22 PM	H2 MFC set to  0.000000
8/19/2012	6:54:22 PM	BCl3 MFC set to  0.000000
8/19/2012	6:54:22 PM	PH3 MFC set to  0.000000
8/19/2012	6:54:22 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:54:22 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:54:22 PM	Tube furnace set to 0
8/19/2012	6:55:30 PM	Helium valve closed
8/19/2012	6:55:30 PM	H2 valve closed
8/19/2012	6:55:30 PM	BCl3 valve closed
8/19/2012	6:55:30 PM	PH3 valve closed
8/19/2012	6:55:30 PM	SiCl4 pre valve closed
8/19/2012	6:55:30 PM	SiCl4 post valve closed
8/19/2012	6:55:30 PM	Main Vac valve closed
8/19/2012	6:55:30 PM	Bypass valve closed
8/19/2012	6:55:30 PM	Bubbler valve closed
8/19/2012	6:55:30 PM	Helium MFC set to  0.000000
8/19/2012	6:55:30 PM	H2 MFC set to  0.000000
8/19/2012	6:55:30 PM	BCl3 MFC set to  0.000000
8/19/2012	6:55:30 PM	PH3 MFC set to  0.000000
8/19/2012	6:55:30 PM	SiCl4 MFC set to  0.000000
8/19/2012	6:55:30 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	6:55:30 PM	Tube furnace set to 0
8/19/2012	6:55:31 PM	Run finished at 6:55 PM
8/19/2012	6:55:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	7:06:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	7:06:22 PM	Recipe started at 7:06 PM
8/19/2012	7:06:22 PM	Helium valve closed
8/19/2012	7:06:22 PM	H2 valve closed
8/19/2012	7:06:22 PM	BCl3 valve closed
8/19/2012	7:06:22 PM	PH3 valve closed
8/19/2012	7:06:22 PM	SiCl4 pre valve closed
8/19/2012	7:06:22 PM	SiCl4 post valve closed
8/19/2012	7:06:22 PM	Main Vac valve closed
8/19/2012	7:06:22 PM	Bubbler valve closed
8/19/2012	7:06:22 PM	Bypass valve opened
8/19/2012	7:06:22 PM	Helium MFC set to  0.000000
8/19/2012	7:06:22 PM	H2 MFC set to  0.000000
8/19/2012	7:06:22 PM	BCl3 MFC set to  0.000000
8/19/2012	7:06:22 PM	PH3 MFC set to  0.000000
8/19/2012	7:06:22 PM	SiCl4 MFC set to  0.000000
8/19/2012	7:06:22 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	7:06:22 PM	Tube furnace set to 0
8/19/2012	7:07:50 PM	Helium valve closed
8/19/2012	7:07:50 PM	H2 valve closed
8/19/2012	7:07:50 PM	BCl3 valve closed
8/19/2012	7:07:50 PM	PH3 valve closed
8/19/2012	7:07:50 PM	SiCl4 pre valve closed
8/19/2012	7:07:50 PM	SiCl4 post valve closed
8/19/2012	7:07:50 PM	Main Vac valve closed
8/19/2012	7:07:50 PM	Bubbler valve closed
8/19/2012	7:07:50 PM	Bypass valve opened
8/19/2012	7:07:50 PM	Helium MFC set to  0.000000
8/19/2012	7:07:50 PM	H2 MFC set to  0.000000
8/19/2012	7:07:50 PM	BCl3 MFC set to  0.000000
8/19/2012	7:07:50 PM	PH3 MFC set to  0.000000
8/19/2012	7:07:50 PM	SiCl4 MFC set to  0.000000
8/19/2012	7:07:50 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	7:07:50 PM	Tube furnace set to 0
8/19/2012	7:08:50 PM	Helium valve closed
8/19/2012	7:08:50 PM	H2 valve closed
8/19/2012	7:08:50 PM	BCl3 valve closed
8/19/2012	7:08:50 PM	PH3 valve closed
8/19/2012	7:08:50 PM	SiCl4 pre valve closed
8/19/2012	7:08:50 PM	SiCl4 post valve closed
8/19/2012	7:08:50 PM	Bypass valve closed
8/19/2012	7:08:50 PM	Bubbler valve closed
8/19/2012	7:08:50 PM	Main Vac valve opened
8/19/2012	7:08:50 PM	Helium MFC set to  0.000000
8/19/2012	7:08:50 PM	H2 MFC set to  0.000000
8/19/2012	7:08:50 PM	BCl3 MFC set to  0.000000
8/19/2012	7:08:50 PM	PH3 MFC set to  0.000000
8/19/2012	7:08:50 PM	SiCl4 MFC set to  0.000000
8/19/2012	7:08:50 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	7:08:50 PM	Tube furnace set to 0
8/19/2012	7:08:51 PM	Run finished at 7:08 PM
8/19/2012	7:08:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	8:05:54 PM	Recipe started at 8:05 PM
8/19/2012	8:05:54 PM	Helium valve closed
8/19/2012	8:05:54 PM	H2 valve closed
8/19/2012	8:05:54 PM	BCl3 valve closed
8/19/2012	8:05:54 PM	PH3 valve closed
8/19/2012	8:05:54 PM	SiCl4 pre valve closed
8/19/2012	8:05:54 PM	SiCl4 post valve closed
8/19/2012	8:05:54 PM	Main Vac valve closed
8/19/2012	8:05:54 PM	Bypass valve closed
8/19/2012	8:05:54 PM	Bubbler valve closed
8/19/2012	8:05:54 PM	Helium MFC set to  0.000000
8/19/2012	8:05:54 PM	H2 MFC set to  0.000000
8/19/2012	8:05:54 PM	BCl3 MFC set to  0.000000
8/19/2012	8:05:54 PM	PH3 MFC set to  0.000000
8/19/2012	8:05:54 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:05:54 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:05:54 PM	Tube furnace set to 0
8/19/2012	8:05:57 PM	Helium valve closed
8/19/2012	8:05:57 PM	BCl3 valve closed
8/19/2012	8:05:57 PM	PH3 valve closed
8/19/2012	8:05:57 PM	SiCl4 pre valve closed
8/19/2012	8:05:57 PM	SiCl4 post valve closed
8/19/2012	8:05:57 PM	Main Vac valve closed
8/19/2012	8:05:57 PM	Bypass valve closed
8/19/2012	8:05:57 PM	Bubbler valve closed
8/19/2012	8:05:57 PM	H2 valve opened
8/19/2012	8:05:57 PM	Helium MFC set to  0.000000
8/19/2012	8:05:57 PM	H2 MFC set to  500.000000
8/19/2012	8:05:57 PM	BCl3 MFC set to  0.000000
8/19/2012	8:05:57 PM	PH3 MFC set to  0.000000
8/19/2012	8:05:57 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:05:57 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:05:57 PM	Tube furnace set to 50
8/19/2012	8:07:09 PM	Helium valve closed
8/19/2012	8:07:09 PM	BCl3 valve closed
8/19/2012	8:07:09 PM	PH3 valve closed
8/19/2012	8:07:09 PM	SiCl4 pre valve closed
8/19/2012	8:07:09 PM	SiCl4 post valve closed
8/19/2012	8:07:09 PM	Main Vac valve closed
8/19/2012	8:07:09 PM	Bypass valve closed
8/19/2012	8:07:09 PM	H2 valve opened
8/19/2012	8:07:09 PM	Bubbler valve opened
8/19/2012	8:07:09 PM	Helium MFC set to  0.000000
8/19/2012	8:07:09 PM	H2 MFC set to  500.000000
8/19/2012	8:07:09 PM	BCl3 MFC set to  0.000000
8/19/2012	8:07:09 PM	PH3 MFC set to  0.000000
8/19/2012	8:07:09 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:07:09 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:07:09 PM	Tube furnace set to 50
8/19/2012	8:07:10 PM	Helium valve closed
8/19/2012	8:07:10 PM	BCl3 valve closed
8/19/2012	8:07:10 PM	PH3 valve closed
8/19/2012	8:07:10 PM	SiCl4 pre valve closed
8/19/2012	8:07:10 PM	SiCl4 post valve closed
8/19/2012	8:07:10 PM	Main Vac valve closed
8/19/2012	8:07:10 PM	Bypass valve closed
8/19/2012	8:07:10 PM	H2 valve opened
8/19/2012	8:07:10 PM	Bubbler valve opened
8/19/2012	8:07:10 PM	Helium MFC set to  0.000000
8/19/2012	8:07:10 PM	H2 MFC set to  500.000000
8/19/2012	8:07:10 PM	BCl3 MFC set to  0.000000
8/19/2012	8:07:10 PM	PH3 MFC set to  0.000000
8/19/2012	8:07:10 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:07:10 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:07:10 PM	Tube furnace set to 1000
8/19/2012	8:27:10 PM	Helium valve closed
8/19/2012	8:27:10 PM	PH3 valve closed
8/19/2012	8:27:10 PM	Main Vac valve closed
8/19/2012	8:27:10 PM	Bypass valve closed
8/19/2012	8:27:10 PM	H2 valve opened
8/19/2012	8:27:10 PM	BCl3 valve opened
8/19/2012	8:27:10 PM	SiCl4 pre valve opened
8/19/2012	8:27:10 PM	SiCl4 post valve opened
8/19/2012	8:27:10 PM	Bubbler valve opened
8/19/2012	8:27:10 PM	Helium MFC set to  0.000000
8/19/2012	8:27:10 PM	H2 MFC set to  500.000000
8/19/2012	8:27:10 PM	BCl3 MFC set to  1.000000
8/19/2012	8:27:10 PM	PH3 MFC set to  0.000000
8/19/2012	8:27:10 PM	SiCl4 MFC set to  50.000000
8/19/2012	8:27:10 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:27:11 PM	Tube furnace set to 1000
8/19/2012	8:47:11 PM	Helium valve closed
8/19/2012	8:47:11 PM	BCl3 valve closed
8/19/2012	8:47:11 PM	PH3 valve closed
8/19/2012	8:47:11 PM	SiCl4 pre valve closed
8/19/2012	8:47:11 PM	SiCl4 post valve closed
8/19/2012	8:47:11 PM	Main Vac valve closed
8/19/2012	8:47:11 PM	Bypass valve closed
8/19/2012	8:47:11 PM	H2 valve opened
8/19/2012	8:47:11 PM	Bubbler valve opened
8/19/2012	8:47:11 PM	Helium MFC set to  0.000000
8/19/2012	8:47:11 PM	H2 MFC set to  500.000000
8/19/2012	8:47:11 PM	BCl3 MFC set to  0.000000
8/19/2012	8:47:11 PM	PH3 MFC set to  0.000000
8/19/2012	8:47:11 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:47:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:47:11 PM	Tube furnace set to 950
8/19/2012	8:50:11 PM	Helium valve closed
8/19/2012	8:50:11 PM	BCl3 valve closed
8/19/2012	8:50:11 PM	PH3 valve closed
8/19/2012	8:50:11 PM	SiCl4 pre valve closed
8/19/2012	8:50:11 PM	SiCl4 post valve closed
8/19/2012	8:50:11 PM	Main Vac valve closed
8/19/2012	8:50:11 PM	Bypass valve closed
8/19/2012	8:50:11 PM	H2 valve opened
8/19/2012	8:50:11 PM	Bubbler valve opened
8/19/2012	8:50:11 PM	Helium MFC set to  0.000000
8/19/2012	8:50:11 PM	H2 MFC set to  500.000000
8/19/2012	8:50:11 PM	BCl3 MFC set to  0.000000
8/19/2012	8:50:11 PM	PH3 MFC set to  0.000000
8/19/2012	8:50:11 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:50:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:50:11 PM	Tube furnace set to 900
8/19/2012	8:53:11 PM	Helium valve closed
8/19/2012	8:53:11 PM	BCl3 valve closed
8/19/2012	8:53:11 PM	PH3 valve closed
8/19/2012	8:53:11 PM	SiCl4 pre valve closed
8/19/2012	8:53:11 PM	SiCl4 post valve closed
8/19/2012	8:53:11 PM	Main Vac valve closed
8/19/2012	8:53:11 PM	Bypass valve closed
8/19/2012	8:53:11 PM	H2 valve opened
8/19/2012	8:53:11 PM	Bubbler valve opened
8/19/2012	8:53:11 PM	Helium MFC set to  0.000000
8/19/2012	8:53:11 PM	H2 MFC set to  500.000000
8/19/2012	8:53:11 PM	BCl3 MFC set to  0.000000
8/19/2012	8:53:11 PM	PH3 MFC set to  0.000000
8/19/2012	8:53:11 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:53:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:53:11 PM	Tube furnace set to 850
8/19/2012	8:56:11 PM	Helium valve closed
8/19/2012	8:56:11 PM	BCl3 valve closed
8/19/2012	8:56:11 PM	PH3 valve closed
8/19/2012	8:56:11 PM	SiCl4 pre valve closed
8/19/2012	8:56:11 PM	SiCl4 post valve closed
8/19/2012	8:56:11 PM	Main Vac valve closed
8/19/2012	8:56:11 PM	Bypass valve closed
8/19/2012	8:56:11 PM	H2 valve opened
8/19/2012	8:56:11 PM	Bubbler valve opened
8/19/2012	8:56:11 PM	Helium MFC set to  0.000000
8/19/2012	8:56:11 PM	H2 MFC set to  500.000000
8/19/2012	8:56:11 PM	BCl3 MFC set to  0.000000
8/19/2012	8:56:11 PM	PH3 MFC set to  0.000000
8/19/2012	8:56:11 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:56:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:56:11 PM	Tube furnace set to 800
8/19/2012	8:59:11 PM	Helium valve closed
8/19/2012	8:59:11 PM	BCl3 valve closed
8/19/2012	8:59:11 PM	PH3 valve closed
8/19/2012	8:59:11 PM	SiCl4 pre valve closed
8/19/2012	8:59:11 PM	SiCl4 post valve closed
8/19/2012	8:59:11 PM	Main Vac valve closed
8/19/2012	8:59:11 PM	Bypass valve closed
8/19/2012	8:59:11 PM	H2 valve opened
8/19/2012	8:59:11 PM	Bubbler valve opened
8/19/2012	8:59:11 PM	Helium MFC set to  0.000000
8/19/2012	8:59:11 PM	H2 MFC set to  500.000000
8/19/2012	8:59:11 PM	BCl3 MFC set to  0.000000
8/19/2012	8:59:11 PM	PH3 MFC set to  0.000000
8/19/2012	8:59:11 PM	SiCl4 MFC set to  0.000000
8/19/2012	8:59:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	8:59:12 PM	Tube furnace set to 750
8/19/2012	9:02:12 PM	H2 valve closed
8/19/2012	9:02:12 PM	BCl3 valve closed
8/19/2012	9:02:12 PM	PH3 valve closed
8/19/2012	9:02:12 PM	SiCl4 pre valve closed
8/19/2012	9:02:12 PM	SiCl4 post valve closed
8/19/2012	9:02:12 PM	Main Vac valve closed
8/19/2012	9:02:12 PM	Bypass valve closed
8/19/2012	9:02:12 PM	Helium valve opened
8/19/2012	9:02:12 PM	Bubbler valve opened
8/19/2012	9:02:12 PM	Helium MFC set to  400.000000
8/19/2012	9:02:12 PM	H2 MFC set to  0.000000
8/19/2012	9:02:12 PM	BCl3 MFC set to  0.000000
8/19/2012	9:02:12 PM	PH3 MFC set to  0.000000
8/19/2012	9:02:12 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:02:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:02:12 PM	Tube furnace set to 0
8/19/2012	9:14:22 PM	Helium valve closed
8/19/2012	9:14:22 PM	H2 valve closed
8/19/2012	9:14:22 PM	BCl3 valve closed
8/19/2012	9:14:22 PM	PH3 valve closed
8/19/2012	9:14:22 PM	SiCl4 pre valve closed
8/19/2012	9:14:22 PM	SiCl4 post valve closed
8/19/2012	9:14:22 PM	Main Vac valve closed
8/19/2012	9:14:22 PM	Bypass valve closed
8/19/2012	9:14:22 PM	Bubbler valve closed
8/19/2012	9:14:22 PM	Helium MFC set to  0.000000
8/19/2012	9:14:22 PM	H2 MFC set to  0.000000
8/19/2012	9:14:22 PM	BCl3 MFC set to  0.000000
8/19/2012	9:14:22 PM	PH3 MFC set to  0.000000
8/19/2012	9:14:22 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:14:22 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:14:22 PM	Tube furnace set to 50
8/19/2012	9:14:24 PM	Helium valve closed
8/19/2012	9:14:24 PM	H2 valve closed
8/19/2012	9:14:24 PM	BCl3 valve closed
8/19/2012	9:14:24 PM	PH3 valve closed
8/19/2012	9:14:24 PM	SiCl4 pre valve closed
8/19/2012	9:14:24 PM	SiCl4 post valve closed
8/19/2012	9:14:24 PM	Main Vac valve closed
8/19/2012	9:14:24 PM	Bubbler valve closed
8/19/2012	9:14:24 PM	Bypass valve opened
8/19/2012	9:14:24 PM	Helium MFC set to  0.000000
8/19/2012	9:14:24 PM	H2 MFC set to  0.000000
8/19/2012	9:14:24 PM	BCl3 MFC set to  0.000000
8/19/2012	9:14:24 PM	PH3 MFC set to  0.000000
8/19/2012	9:14:24 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:14:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:14:25 PM	Tube furnace set to 0
8/19/2012	9:15:21 PM	Helium valve closed
8/19/2012	9:15:21 PM	H2 valve closed
8/19/2012	9:15:21 PM	BCl3 valve closed
8/19/2012	9:15:21 PM	PH3 valve closed
8/19/2012	9:15:21 PM	SiCl4 pre valve closed
8/19/2012	9:15:21 PM	SiCl4 post valve closed
8/19/2012	9:15:21 PM	Bypass valve closed
8/19/2012	9:15:21 PM	Bubbler valve closed
8/19/2012	9:15:21 PM	Main Vac valve opened
8/19/2012	9:15:21 PM	Helium MFC set to  0.000000
8/19/2012	9:15:21 PM	H2 MFC set to  0.000000
8/19/2012	9:15:21 PM	BCl3 MFC set to  0.000000
8/19/2012	9:15:21 PM	PH3 MFC set to  0.000000
8/19/2012	9:15:21 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:15:21 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:15:21 PM	Tube furnace set to 0
8/19/2012	9:15:22 PM	Run finished at 9:15 PM
8/19/2012	9:18:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	9:18:12 PM	Recipe started at 9:18 PM
8/19/2012	9:18:12 PM	Helium valve closed
8/19/2012	9:18:12 PM	H2 valve closed
8/19/2012	9:18:12 PM	BCl3 valve closed
8/19/2012	9:18:12 PM	PH3 valve closed
8/19/2012	9:18:12 PM	SiCl4 pre valve closed
8/19/2012	9:18:12 PM	SiCl4 post valve closed
8/19/2012	9:18:12 PM	Main Vac valve closed
8/19/2012	9:18:12 PM	Bypass valve closed
8/19/2012	9:18:12 PM	Bubbler valve closed
8/19/2012	9:18:12 PM	Helium MFC set to  0.000000
8/19/2012	9:18:12 PM	H2 MFC set to  0.000000
8/19/2012	9:18:12 PM	BCl3 MFC set to  0.000000
8/19/2012	9:18:12 PM	PH3 MFC set to  0.000000
8/19/2012	9:18:12 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:18:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:18:12 PM	Tube furnace set to 0
8/19/2012	9:18:15 PM	H2 valve closed
8/19/2012	9:18:15 PM	BCl3 valve closed
8/19/2012	9:18:15 PM	PH3 valve closed
8/19/2012	9:18:15 PM	SiCl4 pre valve closed
8/19/2012	9:18:15 PM	SiCl4 post valve closed
8/19/2012	9:18:15 PM	Main Vac valve closed
8/19/2012	9:18:15 PM	Bypass valve closed
8/19/2012	9:18:15 PM	Bubbler valve closed
8/19/2012	9:18:15 PM	Helium valve opened
8/19/2012	9:18:15 PM	Helium MFC set to  500.000000
8/19/2012	9:18:15 PM	H2 MFC set to  0.000000
8/19/2012	9:18:15 PM	BCl3 MFC set to  0.000000
8/19/2012	9:18:15 PM	PH3 MFC set to  0.000000
8/19/2012	9:18:15 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:18:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:18:16 PM	Tube furnace set to 0
8/19/2012	9:19:22 PM	Helium valve closed
8/19/2012	9:19:22 PM	H2 valve closed
8/19/2012	9:19:22 PM	BCl3 valve closed
8/19/2012	9:19:22 PM	PH3 valve closed
8/19/2012	9:19:22 PM	SiCl4 pre valve closed
8/19/2012	9:19:22 PM	SiCl4 post valve closed
8/19/2012	9:19:22 PM	Main Vac valve closed
8/19/2012	9:19:22 PM	Bypass valve closed
8/19/2012	9:19:22 PM	Bubbler valve closed
8/19/2012	9:19:22 PM	Helium MFC set to  0.000000
8/19/2012	9:19:22 PM	H2 MFC set to  0.000000
8/19/2012	9:19:22 PM	BCl3 MFC set to  0.000000
8/19/2012	9:19:22 PM	PH3 MFC set to  0.000000
8/19/2012	9:19:22 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:19:22 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:19:22 PM	Tube furnace set to 0
8/19/2012	9:19:23 PM	Run finished at 9:19 PM
8/19/2012	9:19:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2012	9:21:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2012	9:21:38 PM	Recipe started at 9:21 PM
8/19/2012	9:21:38 PM	Helium valve closed
8/19/2012	9:21:38 PM	H2 valve closed
8/19/2012	9:21:38 PM	BCl3 valve closed
8/19/2012	9:21:38 PM	PH3 valve closed
8/19/2012	9:21:38 PM	SiCl4 pre valve closed
8/19/2012	9:21:38 PM	SiCl4 post valve closed
8/19/2012	9:21:38 PM	Main Vac valve closed
8/19/2012	9:21:38 PM	Bubbler valve closed
8/19/2012	9:21:38 PM	Bypass valve opened
8/19/2012	9:21:38 PM	Helium MFC set to  0.000000
8/19/2012	9:21:38 PM	H2 MFC set to  0.000000
8/19/2012	9:21:38 PM	BCl3 MFC set to  0.000000
8/19/2012	9:21:38 PM	PH3 MFC set to  0.000000
8/19/2012	9:21:38 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:21:38 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:21:39 PM	Tube furnace set to 0
8/19/2012	9:22:52 PM	Helium valve closed
8/19/2012	9:22:52 PM	H2 valve closed
8/19/2012	9:22:52 PM	BCl3 valve closed
8/19/2012	9:22:52 PM	PH3 valve closed
8/19/2012	9:22:52 PM	SiCl4 pre valve closed
8/19/2012	9:22:52 PM	SiCl4 post valve closed
8/19/2012	9:22:52 PM	Main Vac valve closed
8/19/2012	9:22:52 PM	Bubbler valve closed
8/19/2012	9:22:52 PM	Bypass valve opened
8/19/2012	9:22:52 PM	Helium MFC set to  0.000000
8/19/2012	9:22:52 PM	H2 MFC set to  0.000000
8/19/2012	9:22:52 PM	BCl3 MFC set to  0.000000
8/19/2012	9:22:52 PM	PH3 MFC set to  0.000000
8/19/2012	9:22:52 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:22:52 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:22:52 PM	Tube furnace set to 0
8/19/2012	9:23:53 PM	Helium valve closed
8/19/2012	9:23:53 PM	H2 valve closed
8/19/2012	9:23:53 PM	BCl3 valve closed
8/19/2012	9:23:53 PM	PH3 valve closed
8/19/2012	9:23:53 PM	SiCl4 pre valve closed
8/19/2012	9:23:53 PM	SiCl4 post valve closed
8/19/2012	9:23:53 PM	Bypass valve closed
8/19/2012	9:23:53 PM	Bubbler valve closed
8/19/2012	9:23:53 PM	Main Vac valve opened
8/19/2012	9:23:53 PM	Helium MFC set to  0.000000
8/19/2012	9:23:53 PM	H2 MFC set to  0.000000
8/19/2012	9:23:53 PM	BCl3 MFC set to  0.000000
8/19/2012	9:23:53 PM	PH3 MFC set to  0.000000
8/19/2012	9:23:53 PM	SiCl4 MFC set to  0.000000
8/19/2012	9:23:53 PM	Bypass solenoid MFC set to  0.000000
8/19/2012	9:23:53 PM	Tube furnace set to 0
8/19/2012	9:23:54 PM	Run finished at 9:23 PM
8/19/2012	9:23:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
